Wafer/FPD Single Substrate Singulation and Sorting System
			Many of today's most critical Processes require a single substrate process for uniform and repeatable results. Whereas in the past lots were processed in bulk cassettes, the industry has shifted to more and more single wafer processing, tracking, lot sorting, lot splitting, lot combining, etc. Introducing the SA 2000 Single Substrate Singulation and Tracking System (SSSTS). The system handles all types of possible transfer requirements, including but not limited to Cassette to Tool via Automatic Fixture, Cassette to Cassette, and Manual Singulation Cassette to Cassette. Furthermore, the system interfaces with your existing Manufacturing Execution System (MES) via GEM/SECS communications for remote operations via host.
		Features 3 - Axis SCARA Robot on linear track User friendly GUI for visualization and selection of transfers Macro Editor to fully customize transfer sequences Transfer Types Process Tool Transfer - Product transferred from Cassette to fixture for processing at a specific tool Incoming cassette is placed at input station Outgoing empty cassette is placed at output station Operator selects the tool that this lot needs to be processed at A single substrate is transferred from the incoming cassette to the tool load/unload station Substrate is placed and secured automatically at the tool load/unload station Operator manually takes the substrate to the tool and processes it Operator returns substrate to the same tool load/unload station System recognizes the returned substrate, releases the fixture, and returns the processed substrate to the outgoing cassette System gets the next substrate from the incoming cassette and transfers it as above, until the entire lot has been processed Cassette-to-Cassette Transfer Incoming cassette is placed at input station Outgoing empty cassette is placed at output station Operator selects type of transfer (chosen from list of configurable transfer macros) Product is transferred per the transfer macro Transfer macros to consist of a series of individual transfers from a definable slot in the incoming cassette to a definable slot in the outgoing cassette Manual single substrate transfer Manual control of a single transfer from slot x in cassette A to slot y in cassette B Allows user to Select Macros locally or via host (through SECS/GEM) Laser scanner locates each substrate in each slot Crash proof - scans all incoming locations to map populated slots and checks for cross-slotting. Will only transfer if source slot is occupied and destination slot empty I/O Diagnostics Screen - Allows maintenance to test all functions, including robot and fixture solenoids/sensors Password Protection - 3 Levels of protected access to the system
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