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Fully Automated
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- FEOL/BEOL Clean, Etch, PEC Etch, Strip, Develop, Electro plating applications
- 150 mm, 150/200 mm bridge, 200 mm and 300 mm product processing capability
- Low Cost of Ownership- minimal chemical and DI water usage
- Modular design and smaller overall footprint
- High RAM - Reliability, Availability and Maintainability
- Standard Processing Tanks: Static, Recirculating, Megasonic, Ultrasonic, and Rinse
- Robust, accurate, high thru-put robotic system with enhanced product transfer movement
- Dry-in/Dry-out Configuration
- SEMI S2, S8, FM 4910, NFPA 79, and NEC compliant
- One year warranty
- Worldwide Service and Support
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