|
Semi Automated
|
- FEOL/BEOL Clean, Etch, PEC Etch, Strip, Develop, Electro plating applications
- 150 mm, 150/200 mm bridge, 200 mm and 300 mm product processing capability
- Low Cost of Ownership - minimal chemical and DI water usage
- Modular design and smaller overall footprint
- High RAM - Reliability, Availability and Maintainability
- Standard Processing Tanks: Static, Recirculating, Megasonic, Ultrasonic and Rinse
- Robust, accurate, high thru-put robotic system with enhanced product transfer movement
- SEMI S2, FM 4910, NFPA 79 and NEC compliant
- One year warranty
- Worldwide Service and Support
|
[ Download PDF ]
|
|
Click on the Screen or Robot for details on the controls or transfer system.
|
