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Metrology - Process Feedback Software System
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Today's complex processes require constant monitoring and closed loop feedback control between metrology result data and the process tooling. To meet this need, Superior Automation has developed a metrology-process tool monitoring system software package. This includes a PC based software control system that will read the metrology data for the latest results (i.e. avg. thickness) and will provide local feedback to the operator at the process tool via a CRT. This will provide visual feedback (i.e. trend chart of thickness/deposition/etch rate) and automated messaging to the operator. For example, if the deposition rate for a particular process tool goes out of control, a message will pop-up on the local display. An additional option that can be provided is a SECS-II/GEM interface that can remotely control the process tool as necessary. So for example, the operator would be required to interface to the process tool via the host system, which would in turn send remote commands to the process tool via the GEM interface. The host PC would display the latest metrology results and would only allow processing at that tool if the rate was under control. |
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Features
- User friendly graphic interface display of process tool performance
- Monitors metrology data in real-time
- Scans data output (text file or ODBC compliant database) from metrology tools
- Provides quick information on the performance of each process tool
- Trend charts of average deposition/etch rate for each process tool
- Configurable specification limits on dep/etch rate for each process tool
- Provides result data for each process tool
- Summarizes performance of each process tool
- Alarms if process tool is running out of specification
- Computes average deposition or etch rate, suggests modified process time for each process tool
- Immediate visual feedback to operator on performance of tool
- Engineer configures recipes for the operator to select, each recipe contains the target thickness to be deposited/removed
- Operator selects from the list of recipes, which selects a target thickness, system then suggests new process time
- Runs on Windows 98, NT 4.0 and Windows 2000 operating systems
Capabilities
- SECS-II/GEM interface to metrology data output
- SECS-II/GEM interface to process tools to automate machine setup (i.e. process time, power level, etc.) based on metrology data
- MS SQL Server 7.0 relational database for high-end data collection and retrieval
- ODBC/OLEDB interface to popular databases (Oracle, Sybase, DB2, etc.)
- SPC charts for metrology data by process tool, configurable notification via enable/disable of individual Western Electric SPC rules
- Custom algorithms for special processing needs
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Main Screen - displays process tool performance at a glance; provides operators and engineers with suggested process adjustments
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Tool Trend Chart - shows performance of selected tool for last x successive runs; select any data point for more detailed information, including lot, date/time ran, etc.
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For more information or a quotation, please call or e-mail us through the on-line contact section of this Web Site. |
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