Cassette and Wafer ID Mapping System
Today's ever rising semiconductor production costs demand a proactive approach to WIP tracking and control. Eliminate operator errors that scrap product by implementing our Cassette and Wafer ID Mapping System. We offer an advanced control system for ID reading and verification of lots and wafers from your existing Manufacturing Execution System (MES), before and not after your lot is fed into your tool. Our system includes a remote host PC NT 4.0 workstation and local (or remote) SQL/ODBC database (interface), Ethernet 10/100 base-T connectivity, and is integrated with a PCI based vision system and single wafer handler. The on-board vision system can read all standard and most non-standard hard and soft markings on 150/200/300 mm substrates. And the system is compatible with barcode, OCR, and dot matrix codings. Offering your operators an automated, user-friendly Man Machine Interface (MMI) with advanced error handling for misplaced/mismatched lots/wafers, this system will increase your yield by eliminating misprocessing before it occurs. Your ROI is immediately justified when scrap processing is significantly reduced, and sometimes even on a single saved lot.
Features
  • 150/200/300 mm wafer compatible
  • Barcode/OCR/Dot Matrix compatible
  • Automatic and Manual operation
    • Fully automatic operation maps cassette ID and wafer IDs in full or partially full cassettes
    • Manually select cassette or any present wafer in cassette and cassette ID and/or wafer IDs
  • Integrated 2-axis single wafer handling
    • Pre-aligner for Flat/notch finding
    • Presents substrates to vision system
  • MES interface
    • GEM/SECS interface
    • ODBC/SQL/DB2 link available
  • Advanced MES verification prior to process
    • Tool destination verification
    • Lot ID verification
    • Wafer ID to Slot ID verification
    • Misplaced Lot Alarm (Lot at wrong tool)
    • Mismatched Wafer ID Alarm (Wafer mismatch to cassette)
  • Graphical User Interface
    • Display of cassette
    • Display of cassette ID
    • Display of slots in cassette
    • Display of slot ID
    • Display of wafers in slots
    • Display of wafer ID
  • Optional SMIF/FOUP Interface
For more information or a quotation, please call or e-mail us through the on-line contact section of this Web Site.