GEMSUITE^TM

Turn-key Fab-wide equipment and lot tracking system
Consists of following software modules:
- GEMSTATION– automated operator interface, recipe selection, and tool data collection for any GEM/SECS compliant tool
- GEM2APC– automated lot validation, recipe lookup, and process recipe adjustment
- GEMLOGBOOK– Equipment and lot tracking software for tools without GEM/SECS interface
- GEM2VIEW– analysis and reporting tool for GEMSTATIONTM /GEMLOGBOOK data
- GEM2TRENDS – run-to-run analysis and comparison tool for process/equipment engineer
Connects to any GEM/SECS compliant equipment
Provides standard common operator interface for all tools
Prevents operator misprocessing
Automates running the tool (operator does not touch any machine controls or settings)
Complete traceability - Tracks all lot data, process data, alarms, and events
Run-to-Run Analysis and Comparison
Recipe Management -- Upload all recipes to server for safe-keeping and restoration to process tool
Open Architecture Database -- Stores all data to standard MS SQL server database, open architecture allows end user to create own custom reports and data presentation

GEMSTATION^TM Common Tool Interface

Replaces the custom operator interface on each tool
One common interface across all tools in the factory
Training is minimal since every tool has same control panel
Operator does not touch the tool controls, all functions are remotely controlled by GEMSTATION^TM
See status of machine and lots currently running on the tool at a glance
Works with any tool that is GEM compliant

GEMSTATION^TM Complete Traceability (Tool Status Variables)

Select any or all events to be logged to GEMSTATION database
See complete play-by-play events occurring in real-time
Link custom data reports and data collection scenarios to events
Configure lot start and lot complete time data capture to tool events, thus data sets for each lot ran can be compared quickly (see GEM2VIEW)
Automatically upload all available status variables to GEMSTATION database
Select any or all variables for data logging (Data collection sample rates as fast as 1 second intervals (possibly even faster, only limited by the tool’s communication speed, not GEMSTATION)
Select data to be available to OPC clients
Select data to be logged continuously or only when the data value changes

GEMSTATION^TM Complete Traceability (Tool Alarms)

Select any or all alarms to be logged to GEMSTATION database
See alarms occurring in real-time
Provides real-time alarm status notification, through GEM2VIEW
- Configure critical alarms to lockout tool from processing
- Send e-mail/page notification on selected alarms

GEMSTATION^TM Complete Traceability (Reports)

Create any no. of custom reports (consisting of selected status variables from the tool)
Link reports to events (i.e. when the event occurs, the report is requested from the tool, the received data is stored to GEMSTATION database)
Start/Stop continuous request of custom reports on event occurrence (i.e. when a process chamber started event is received, start data collection, etc.)

GEMSTATION^TM Optional Features

Automated run data entry and recipe selection - Via bar code scanning or RF ID scanning, Equipment uptime/downtime tracking
E-Mail notification on user-specified alarms or events
Fault-tolerant tool communications – Automatically re-established with tool on either a tool reset or GEMSTATION re-start
Fault-tolerant data collection - On remote SQL server or network failure, all data is stored locally until network/db connection is re-established
Custom data collection scenarios - Based on user-specified criteria (i.e. event received or status variable change) can collect custom sets of data. For example, collect specific process variables when product is processing at a specified process chamber or module.
OPC client capability - GEMSTATION can act as an OPC client to gather additional outside data (i.e. facility monitoring systems) to associate with the process tool and run-to-run data
OPC server - GEMSTATION acts as an OPC server to provide data to any OPC client
Tool Lockout – GEMSTATION locks out running the machine based on engineer-specified criteria ( i.e. alarm conditions, process variable out of spec., remote facility parameters out of spec.)

GEM2APC^TM

GEMLOGBOOK^TM

Factory-wide Lot and Equipment Tracking
Eliminates paper log book
Scan bar code or RFID tag for tracking lots and equipment usage
Lot History reports – play-by-play of each lot, which tool it was ran on, which recipe was selected
Tool History reports – summary of each lot and recipe ran on the tool, alarm Pareto charts, recipe Pareto charts
Production summary reporting – How many lots/wafers where ran on each tool per shift, tool uptime/downtime, overall tool utilization, OEE
Open Architecture Database -- Stores all data to standard MS SQL server database, open architecture allows end user to create own custom reports and data presentation

GEM2VIEW^TM

Real-time status of equipment and lots
Real-time tool alarm status and notification
Lot History reports – play-by-play of each lot, which tool it was ran on, which recipe was selected
Tool History reports – summary of each lot and recipe ran on the tool, alarm Pareto charts, recipe Pareto charts, tool uptime/downtime
Tool Diagnostic Database -- Online troubleshooting instructions based on alarm, Logs equipment repairs, maintenance tech. can review past repair history and previous solutions to the current problem
Production summary reporting – How many lots/wafers where ran on each tool per shift, tool uptime/downtime, overall tool utilization, OEE, Summaries for each tool area and fab-wide
Open Architecture Database -- Stores all data to standard MS SQL server database, Allows end user to create own custom reports and data presentation

GEMSUITETM