SUPERIOR AUTOMATION CHEMFLOW DELIVERY SYSTEM

STANDARD FEATURES:

• Cabinet Material
  • White Polypropylene (Standard)
  • FM 4910 Approved Materials (optional)
  • 304 Stainless Steel with a # 4 Brush Finish
• Cabinet Configuration
  • Single Drum (1 gallon to 55 gallon)
  • Dual Drum (55 gallon) 
• Control System
  • PLC control with Intuitive Touch Screen Interface
  • Multiple viewing screens for process setup, run, and maintenance
  • Multi-level password protection (operator, engineering, maintenance)
  • I/O Diagnostics
  • Standard and Customized Tool Interfaces available
• Switching or non-switching systems
• Local valves
• Pneumatic pump (pump size depends on application)
• Pump isolation valves
• DI water flush and N2 purge to clean and clear lines
• Heavy duty roller section for drum removal                           
• Drum retaining straps
• Ventilated and monitored chemical compartments
• Light tower to show cabinet status
• Double contained bulk head for chemical lines
• All Teflon plumbing lines and valves
• Purged and monitored electrical compartment
• Automated or manual control
• EMO button (emergency power off)
• Safety Interlocks
  • Secondary containment leak detection
  • Photohelic exhaust monitor
  • Independent door sensors
  • CDA pressure switch
  • N2 pressure switch
  • Liquid level sensing system with alarms
• Facility Connections
  • Exhaust Collar:
  • N2 Supply: ½” FNPT
  • CDA Supply: ½” FNPT
  • Chemical Line: 1.5” secondary, ½” primary

OPTIONS

• Bulk Chemical Control and Management System
• Filter chamber with isolation valves
• Sample ports
• VMB (valve manifold box)
• Day tank with recirculation loop
• SEMI Complance/3rd Party Certification
• Self closing doors with internal release latches for operator safety
• Seismic brackets (L or Z style)

BULK CHEMICAL CONTROL AND MANAGEMENT SYSTEM

 Control System

• Mitsubishi FX series PLC (one for each CDU, and one for each OCP)
  • Monitors and controls all process functions
    • Turns pump on/off
    • Open/closes valves
    • Centric chemical monitoring for individual tools
  • Monitors and controls all alarm conditions and safety monitoring points
    • Photohelic exhaust monitor
    • Level sensors for chemical drums
    • Leak detection
    • Misc. interlocks (CDA, N2, Door)
  • Data logging to host PC via Ethernet network
  • Alarm screen with system reset)
  • 5.7” Touch Screen Interface (one for each CDU, and one for each OCP)
  • Multiple viewing screens for process setup, run, and maintenance
  • Multi-level password protection (operator, engineering, maintenance)
  • I/O Diagnostics

 Management System/Data Server

• Dell Precision or equivalent
  • 1 Gb system memory
  • Two hot swap 80 Gb SATA hard drives
  • Raid 1 Mirror and fault tolerance
  • Window XP OS
  • 10/100 Base T Ethernet
• Web Server allows remote monitoring via Intranet/Internet
• Stores information to SQL server database
• Monitors all signals coming from the OCP’s
• Sends control signals to appropriate CDU
• Collects all process events and alarms
• Page/e-mail notification on user specified alarms and events (configurable page lists based on day of week and shift)