SA 5000 Fully Automated Batch-Immersion Station

Features:

• FEOL/BEOL Clean, Etch, PEC Etch, Strip, Develop, Electro plating applications
• 150 mm, 150/200 mm bridge, 200mm and 300 mm Product Processing Capability
• Low cost of ownership-Minimal Chemical & DI water usage
• Modular Design and Smaller overall footprint
• High RAM – Reliability, Availability and Maintainability
• Standard Processing Tanks: Static, Recirculating, Megasonic, Ultrasonic and Rinse
• Robust, accurate, high thru-put robotic system with enhanced product transfer movement
• Dry-in/Dry-out Configuration Green Drying Technology
• SEMI S2, S8, FM4910, NFPA 79, CE, and NEC safety compliant
• Facility connections located on backside of bench
• One year warranty and Worldwide Service and Support

SA 5000 Control System:

• Real time Process Control and Monitoring
• Multi-Tasking, Multiple Batch Scheduling System
• Flexible Recipe Management System
• Batch-centric reporting
• Data logging
• Lot tracking/event trending
• Password protected multi access levels
• Automatic Mode Sequence
• 100% 300mm GEM/SECS-II compliant
• Advanced Error Recovery   

Optional Features:

• pH, resistivity, conductivity, and bath life monitoring and control
• HEPA/ULPA air filtration
• Advanced Chemical Concentration Control
• 2 year Warranty