Our GEMSTATION™ Software Suite provides a comprehensive Cell Controller and Data Collection package through an easy to use standard operator interface, giving you the data and analysis tools needed to improve yield, achieve OEE, and eliminate misprocessing and scrapping.

• Interfaces to any GEM/SECS compliant Tool
• Captures lot/wafer  information and process data to allow quick analysis of each run
• Run-to-Run comparison charts
• Process/Tool Characterization
• Standard OEE Reports
• Fault Detection and Classification
• Supports OPC and XML data formats
• Optional GEM2APC™ package provides Run-to-Run control via MES interface, recipe lookup, and automatic process adjustment.