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GEM Station™ Software Suite Our GEMSTATION™ Software Suite provides a comprehensive Cell Controller and Data Collection package through an easy to use standard operator interface, giving you the data and analysis tools needed to improve yield, achieve OEE, and eliminate misprocessing and scrapping.    
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Welcome to Superior Automation Superior Automation will be at Semicon West 2009. Visit booth# 12345. The array of new services and products is the fine point of this year's display at Semicon.
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Superior Automation: Technology that Works Products and services that go beyond the initial installation of the tool. Superior Automation's Gurantee surpasses all customers' needs, wants, and expectations. Contact us today to discuss your automation project.
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SEMICON West 2009

Superior Automation is part of Semicon West 2009. Visit our booth for an extensive look at the product offerings and see demos of the newest process tools. Visit us at Booth 1835, South Hall.  See you there!
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Regional and National Reps

Our Sales Representatives span the globe from California to Japan and China. Contact them today for a fresh look at Automation Solutions.

Retrofit Video

Sumitomo Sitix Silicon, Inc. wet bench retrofit.

Video coming soon...

New Products

New Products are featured in our Products and Services area. We're delivering new modules every quarter.








Superior Automation was established in 1994 by a group of industry Engineers and Professionals.

Drawing experience from both Fab and OEM supplier backgrounds the founders saw a need for a
higher level of quality and technology in automation solutions.

Superior Automation has since grown to offer a wide spectrum of cutting edge automation solutions, products, and services.

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Our Satisfied Clients
 

Case Studies

Sumitomo Sitix Silicon, Inc. required a retrofit on an antiquated SubMicron wet bench.
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GEM Suite

Explore all of the fab automation possibilities using our GEMSuite™ Tools.
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Members Benefits

Sign up Today to access our Video Gallery. We also have demos of our software for evaluation.

Custom GUI Design

Custom design for all wet process tools.

World Class Support

We offer world class support fro all of our product and Services. 24/7 tool support is critical for today's demanding manufacturing processes. Learn how we can support exisitng tools or provide new systems to meet your needs.
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Mission Statement

To provide the highest value and quality in automation products and services through continuous development and improvement of automation technologies, while working closely with our customers to assure complete satisfaction.

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